Mu Feng

Fast and accurate 3D mask model for full-chip OPC and verification

Peng Liu, Yu Cao, Luoqi Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 48 citations

Engineering, Computer Engineering, Electrical Engineering +11

A full-chip 3D computational lithography framework

Peng Liu, Zhengfan Zhang, Song Lan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 24 citations

Engineering, Computer Engineering, Electrical Engineering +13

Source mask optimization methodology (SMO) and application to real full chip optical proximity correction

Dongqing Zhang, GekSoon Chua, YeeMei Foong et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 19 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

Optimizing OPC data sampling based on "orthogonal vector space"

Yuyang Sun, Yee Mei Foong, Yingfang Wang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 16 citations

Engineering, Manufacturing Engineering, Feature Engineering +15

Predictive focus exposure modeling (FEM) for full-chip lithography

Luoqi Chen, Yu Cao, Huayu Liu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 10 citations

Engineering, Computational Engineering, Electrical Engineering +17