Concepedia

Tianyu Ma

TM

Statistics

Publications

5

Citations

133

H-Index

5

Active since

2017

Affiliations

University of Houston(Current)

Tianyu Ma is an author at University of Houston specializing in materials engineering, plasma-surface interactions, and natural sciences.

ORCID

Publications per year

2017–2022

5

Publications

5

Investigation of the role of silicon in TiAlSiN coating deposited on TiAl alloys during long-term oxidation

Kai Zhang, Li Xin, Tianyu Ma et al. · Corrosion Science · 2022 · 49 citations

, , +14

Comparisons of NF3 plasma-cleaned Y2O3, YOF, and YF3 chamber coatings during silicon etching in Cl2 plasmas

Tianyu Ma, Tyler List, Vincent M. Donnelly · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2018 · 38 citations

, , +17

Y2O3 wall interactions in Cl2 etching and NF3 cleaning plasmas

Tianyu Ma, Tyler List, Vincent M. Donnelly · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2017 · 19 citations

, , +17

Recombination coefficients for Cl on plasma-conditioned yttrium oxide chamber wall surfaces

Tianyu Ma, Tyler List, Priyanka Arora et al. · Journal of Applied Physics · 2019 · 14 citations

, , +16

Complex transients in power modulated inductively-coupled chlorine plasmas

Tyler List, Tianyu Ma, Priyanka Arora et al. · Plasma Sources Science and Technology · 2019 · 13 citations

, , +15

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