Statistics
Publications
3
Citations
80
H-Index
3
Active since
2014
Affiliations
Han Chen is an author at Chinese Academy of Sciences specializing in memory devices, etch mechanisms, and thin-film deposition.
Publications per year
2014–2020
3
3
Liyong Zhang, Shiwei Xu, J. J. He et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2018 · 12 citations
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