Concepedia

Hiroshi Ito

HI

Statistics

Publications

41

Citations

1K

H-Index

18

Active since

1973

Affiliations

IBM Research - Almaden(Current)

Tohoku University

IBM (United States)

Toyota Technological Institute

Toyota Central Research and Development Laboratories (Japan)

Hiroshi Ito is an author at IBM Research - Almaden specializing in natural sciences, materials science, and polymer chemistry.

Publications per year

1973–2016

41

Publications

41

Chemical amplification resists: Inception, implementation in device manufacture, and new developments

Hiroshi Ito · Journal of Polymer Science Part A Polymer Chemistry · 2003 · 117 citations

Engineering, Materials Engineering, Materials Science +14

Characterization of Reactive Dissolution and Swelling of Polymer Films Using a Quartz Crystal Microbalance and Visible and Infrared Reflectance Spectroscopy

William D. Hinsberg, F. A. Houle, S.-W. Lee et al. · Macromolecules · 2005 · 80 citations

Natural Sciences, Chemistry, Materials Science +17

Atomistic Mechanisms of Chemical Mechanical Polishing of a Cu Surface in Aqueous H<sub>2</sub>O<sub>2</sub>: Tight-Binding Quantum Chemical Molecular Dynamics Simulations

Kentaro Kawaguchi, Hiroshi Ito, Takuya Kuwahara et al. · ACS Applied Materials & Interfaces · 2016 · 68 citations

Natural Sciences, Materials Engineering, Materials Science +17

Laser emission from a solar-pumped fiber

Shintaro Mizuno, Hiroshi Ito, Kazuo Hasegawa et al. · Optics Express · 2012 · 67 citations · Full text

Natural Sciences, Physics, Optical Materials +16

Dissolution behavior of chemically amplified resist polymers for 248-, 193-, and 157-nm lithography

Hiroshi Ito · IBM Journal of Research and Development · 2001 · 56 citations

Natural Sciences, Chemistry, Materials Science +12

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