Meng Liu is an author at Chinese Academy of Sciences specializing in microfabrication, mechanical engineering, and microelectronics.
Top concepts
EngineeringMicroelectronicsMicrofabricationMechanical EngineeringSensorsEducationMeasurementSensor DesignApplied PhysicsInstrumentation
Publications per year
2010–2021
3
3
An emission stable vertical air channel diode by a low-cost and IC compatible BOE etching process
Meng Liu, Songtai Liang, Dongfang Shi et al. · Nanoscale · 2021 · 29 citations
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