Shengen Zhang

Fast optical proximity correction based on graph convolution network

Shengen Zhang, Xu Ma, Junbi Zhang et al. · 2021 · 15 citations

Computing, Computational Engineering, Computer Science +17

Informational Lithography Approach Based on Source and Mask Optimization

Xu Ma, Yihua Pan, Shengen Zhang et al. · IEEE Transactions on Computational Imaging · 2020 · 13 citations

Engineering, Computer Engineering, Electrical Engineering +16

Fast Pixelated Lithographic Source and Mask Joint Optimization Based on Compressive Sensing

Zhiqiang Wang, Xu Ma, Rui Chen et al. · IEEE Transactions on Computational Imaging · 2020 · 12 citations

Engineering, Computer Engineering, Manufacturing Engineering +16

Fast inverse lithography approach based on a model-driven graph convolutional network

Shengen Zhang, Xu Ma, Junbi Zhang · Optics Express · 2023 · 12 citations · Full text

Computing, Computational Engineering, Manufacturing Engineering +16

Nonlinear compressive inverse lithography aided by low-rank regularization

Xu Ma, Zhiqiang Wang, Jianchen Zhu et al. · Optics Express · 2019 · 11 citations · Full text

Natural Sciences, Electrical Engineering, Digital Imaging +13