Concepedia

Amrita Verma

AV

Statistics

Publications

2

Citations

49

H-Index

2

Active since

1996

Affiliations

Applied Materials (United States)(Current)

Amrita Verma is an author at Applied Materials (United States) specializing in applied physics, thin films, and materials science.

Top concepts

Thin FilmsEngineeringApplied PhysicsMaterial ScienceSurface ScienceElectronic DevicesElectronic MaterialsMaterials EngineeringElectrical Engineering

Publications per year

1996–1996

2

Publications

2

Dielectric Constant and Stability of Fluorine‐Doped Plasma Enhanced Chemical Vapor Deposited SiO2 Thin Films

Peter W. Lee, Shinsuke Mizuno, Amrita Verma et al. · Journal of The Electrochemical Society · 1996 · 36 citations

Materials Science, Electrical Engineering, Electronic Devices +11

Improved gap-filling capability of fluorine-doped PECVD silicon oxide thin films

Shinsuke Mizuno, Amrita Verma, Peter Lee et al. · Thin Solid Films · 1996 · 13 citations

Materials Science, Materials Engineering, Engineering +6

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