Concepedia

Huai-Yu Cheng

HC

Statistics

Publications

6

Citations

118

H-Index

6

Active since

2005

Affiliations

National Tsing Hua University(Current)

Industrial Technology Research Institute

National Formosa University

Feng Chia University

Huai-Yu Cheng is an author at National Tsing Hua University specializing in electronic materials, materials engineering, and materials science.

Publications per year

2005–2007

6

Publications

6

5 - nm -thick TaSiC amorphous films stable up to 750°C as a diffusion barrier for copper metallization

Tingyi Lin, Huai-Yu Cheng, Tsung‐Shune Chin et al. · Applied Physics Letters · 2007 · 31 citations

, , +17

Wet-etching characteristics of Ge/sub 2/Sb/sub 2/Te/sub 5/ thin films for phase-change memory

Huai-Yu Cheng, Chao‐An Jong, Chain‐Ming Lee et al. · IEEE Transactions on Magnetics · 2005 · 25 citations

, , +17

Highly electrical resistive SiTiN<i><sub>x</sub></i>heating layers and diffusion barriers for PCRAM

Huai-Yu Cheng, Yi‐Chen Chen, Ren‐Jei Chung et al. · Semiconductor Science and Technology · 2006 · 18 citations

, , +17

Thermal Stability and Electrical Resistivity of SiTaN[sub x] Heating Layer for Phase-Change Memories

Huai-Yu Cheng, Yi‐Chen Chen, Chain‐Ming Lee et al. · Journal of The Electrochemical Society · 2006 · 17 citations

, , +17

Highly Thermal-Stable Amorphous TaSi[sub 2]C[sub x] Films as Diffusion Barrier

Tingyi Lin, Huai-Yu Cheng, Tsung‐Shune Chin et al. · Journal of The Electrochemical Society · 2007 · 14 citations

, , +17

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