Concepedia
Statistics
Publications
6
Citations
118
H-Index
Active since
2005
Affiliations
National Tsing Hua University(Current)
Industrial Technology Research Institute
National Formosa University
Feng Chia University
Huai-Yu Cheng is an author at National Tsing Hua University specializing in applied physics, engineering, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceThin FilmsSurface ScienceMaterials EngineeringElectrical EngineeringMicroelectronicsCondensed Matter PhysicsSemiconductors
Publications per year
2005–2007
5 - nm -thick TaSiC amorphous films stable up to 750°C as a diffusion barrier for copper metallization
Tingyi Lin, Huai-Yu Cheng, Tsung‐Shune Chin et al. · Applied Physics Letters · 2007 · 31 citations
Engineering, Thin Film Process Technology, Thermal Stability +17
Wet-etching characteristics of Ge/sub 2/Sb/sub 2/Te/sub 5/ thin films for phase-change memory
Huai-Yu Cheng, Chao‐An Jong, Chain‐Ming Lee et al. · IEEE Transactions on Magnetics · 2005 · 25 citations
Materials Science, Materials Engineering, Electrical Engineering +15
Highly electrical resistive SiTiN<i><sub>x</sub></i>heating layers and diffusion barriers for PCRAM
Huai-Yu Cheng, Yi‐Chen Chen, Ren‐Jei Chung et al. · Semiconductor Science and Technology · 2006 · 18 citations
Engineering, Chemistry, Phase Change Memory +23
Thermal Stability and Electrical Resistivity of SiTaN[sub x] Heating Layer for Phase-Change Memories
Huai-Yu Cheng, Yi‐Chen Chen, Chain‐Ming Lee et al. · Journal of The Electrochemical Society · 2006 · 17 citations
Non-volatile Memory, Engineering, Emerging Memory Technology +24
Highly Thermal-Stable Amorphous TaSi[sub 2]C[sub x] Films as Diffusion Barrier
Tingyi Lin, Huai-Yu Cheng, Tsung‐Shune Chin et al. · Journal of The Electrochemical Society · 2007 · 14 citations
Materials Science, Materials Engineering, Electrical Engineering +14
1–5 of 6