Zhilang Lin

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Publications

Citations

154

H-Index

Active since

2003

Affiliations

Shanghai Institute of Microsystem and Information Technology(Current)

Chinese Academy of Sciences

Zhilang Lin is an author at Shanghai Institute of Microsystem and Information Technology specializing in natural sciences, physics, and materials science.

Publications per year

2003–2004

Publications

Study of HfO2 thin films prepared by electron beam evaporation

Yongjin Wang, Zhilang Lin, Xinli Cheng et al. · Applied Surface Science · 2004 · 86 citations

Natural Sciences, Materials Science, Physics +13

Optimization of PECVD silicon oxynitride films for anti-reflection coating

Yongjin Wang, Xinli Cheng, Zhilang Lin et al. · Vacuum · 2003 · 32 citations

Natural Sciences, Materials Engineering, Materials Science +14

Scattering loss in silicon-on-insulator rib waveguides fabricated by inductively coupled plasma reactive ion etching

Yongjin Wang, Zhilang Lin, Xinli Cheng et al. · Applied Physics Letters · 2004 · 15 citations

Engineering, Electrical Engineering, Physics +14

Analysis of IBAD silicon oxynitride film for anti-reflection coating application

Yongjin Wang, Xinli Cheng, Zhilang Lin et al. · Journal of Non-Crystalline Solids · 2004 · 11 citations

Natural Sciences, Materials Engineering, Materials Science +14

Monolithic beam splitter in silicon-on-insulator

Yongjin Wang, Xinli Cheng, Zhilang Lin et al. · Optics Express · 2004 · 10 citations · Full text

Engineering, Electrical Engineering, Physics +17

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