Statistics
Publications
6
Citations
333
H-Index
6
Active since
1996
Affiliations
Sung‐Chul Lim is an author at Korea Advanced Institute of Science and Technology specializing in materials engineering, materials science, and natural sciences.
Publications per year
1996–2009
6
6
Simulation and fabrication of attenuated phase-shifting masks: CrF_x
Eunah Kim, Seungbum Hong, Kyong-Sub Kim et al. · Applied Optics · 1997 · 11 citations
Natural Sciences, Materials Engineering, Materials Science +17
Seungbum Hong, Eunah Kim, Byeong‐Soo Bae et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 11 citations
Natural Sciences, Materials Engineering, Materials Science +13
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