Concepedia

Mathews

MA

Statistics

Publications

1

Citations

13

H-Index

1

Active since

1992

Affiliations

Micron (United States)(Current)

Mathews is an author at Micron (United States) specializing in semiconductor thin films, microelectronics, and dynamic random-access memory.

Publications per year

1992–1992

1

Publications

1

A high-C capacitor (20.4 fF/ mu m/sup 2/) with ultrathin CVD-Ta/sub 2/O/sub 5/ films deposited on rugged poly-Si for high density DRAMs

Fazan, Mathews, Sandler et al. · 1992 · 13 citations

, , +17

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