F. -A. Sarrott

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Active since

1989

Affiliations

Max Planck Institute for Plasma Physics(Current)

F. -A. Sarrott is an author at Max Planck Institute for Plasma Physics specializing in plasma-enhanced chemical vapor deposition, passivation, and natural sciences.

Publications per year

1989–1989

Publications

Surface hydrogen content and passivation of silicon deposited by plasma induced chemical vapor deposition from silane and the implications for the reaction mechanism

S. Vepřek, F. -A. Sarrott, S. Rambert et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 87 citations

Natural Sciences, Materials Engineering, Materials Science +17

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