Concepedia

Shinji Saito Kuramasu

SS

1

Publications

85

Citations

1

H-Index

1992

Active since

Affiliations

Panasonic (Japan)(Current)

Shinji Saito Kuramasu is an author at Panasonic (Japan) specializing in applied physics, thin films, and surface science.

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Publications per year

1992–1992

1

Publications

1

Plasma Etching of RuO<sub>2</sub> Thin Films

Shinji Saito Kuramasu · Japanese Journal of Applied Physics · 1992 · 85 citations

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