R. Piekarz

Design and Fabrication of a Lead Zirconate Titanate (PZT) Thin Film Acoustic Sensor

Ronald G. Polcawich, Michael V. Scanlon, Jeffrey S. Pulskamp et al. · Integrated ferroelectrics · 2003 · 41 citations

Biomedical Acoustics, Engineering, Mechanical Engineering +25

Fabrication of suspended piezoelectric microresonators

B. Piekarski, Madan Dubey, Don L. DeVoe et al. · Integrated ferroelectrics · 1999 · 14 citations

Materials Science, Electrical Engineering, Engineering +14

Highly accelerated lifetime testing (HALT) of lead zirconate titanate (PZT) thin films

Ronald G. Polcawich, P. Vanatta, R. Piekarz et al. · 2002 · 11 citations

Process and fabrication of a lead zirconate titanate thin film pressure sensor

Eugene Zakar, Madan Dubey, B. Piekarski et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 10 citations

Materials Science, Electrical Engineering, Sensor Application +14

Study of PZT Film Stress in Multilayer Structures for MEMS Devices

Eugene Zakar, Madan Dubey, Ronald G. Polcawich et al. · MRS Proceedings · 1999 · 10 citations

Materials Science, Materials Engineering, Electrical Engineering +8