Statistics
Publications
1
Citations
15
H-Index
1
Active since
1999
Affiliations
University of Stuttgart(Current)
Stefan Polach is an author at University of Stuttgart specializing in mask fabrication, thin-film sensors, and silicon nitride.
Publications per year
1999–1999
1
1
Stefan Polach, D. Horst, G. Maier et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 15 citations
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