Concepedia

G. L. Huffman

GL

Statistics

Publications

1

Citations

84

H-Index

1

Active since

1989

Affiliations

Pennsylvania State University(Current)

G. L. Huffman is an author at Pennsylvania State University specializing in thin films, nitride thin films, and stress.

Publications per year

1989–1989

1

Publications

1

Stress dependence of reactively sputtered aluminum nitride thin films on sputtering parameters

G. L. Huffman, D. E. Fahnline, R. Messier et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 84 citations

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