Concepedia

Kentaro Tokoro

KT

Statistics

Publications

2

Citations

42

H-Index

2

Active since

2016

Affiliations

Yamagata University(Current)

Kentaro Tokoro is an author at Yamagata University specializing in chemistry, surface science, and chemical engineering.

Top concepts

ChemistryEngineeringSurface ScienceMaterial ScienceChemical EngineeringThin FilmsNanotechnologyApplied PhysicsSurface ChemistryMaterials Engineering

Publications per year

2016–2018

2

Publications

2

Room-temperature atomic layer deposition of ZrO2 using tetrakis(ethylmethylamino)zirconium and plasma-excited humidified argon

Kensaku Kanomata, Kentaro Tokoro, Tsuyoshi Imai et al. · Applied Surface Science · 2016 · 29 citations

Materials Science, Chemical Engineering, Engineering +5

Room-Temperature Atomic Layer Deposition of SnO<sub>2</sub> Using Tetramethyltin and Its Application to TFT Fabrication

Kentaro Tokoro, Shunsuke Saito, Kensaku Kanomata et al. · IEICE Transactions on Electronics · 2018 · 13 citations

Engineering, Thin Film Process Technology, Chemistry +19

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