Concepedia

T. Hayashi

TH

4

Publications

127

Citations

4

H-Index

1992

Active since

Affiliations

Kanazawa Institute of Technology(Current)

T. Hayashi is an author at Kanazawa Institute of Technology specializing in engineering, materials science, and thin films.

Top concepts

Publications per year

1992–2004

4

Publications

4

Deposition of cubic boron nitride thin films by ion-beam-enhanced deposition

Nobuaki Tanabe, T. Hayashi, M. Iwaki · Diamond and Related Materials · 1992 · 52 citations

, , +7

Substrate temperature influence of c-BN thin film formation by IBED

Nobuaki Tanabe, T. Hayashi, M. Iwaki · Diamond and Related Materials · 1992 · 41 citations

, , +7

Imidized organic thin films deposited on glass substrates

Kazuhiro Fukushima, Yuki Ikeda, T. Hayashi et al. · Thin Solid Films · 2001 · 18 citations

, , +3

Highly reliable Cu/low-k dual-damascene interconnect technology with hybrid (PAE/SiOC) dielectrics for 65 nm-node high performance eDRAM

Akihiro Kajita, T. Usui, Masao Yamada et al. · 2004 · 16 citations

, , +15

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