Sadaki Nakamura

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Active since

2005

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

Sadaki Nakamura is an author at National Institute of Advanced Industrial Science and Technology specializing in ozone, ozone chemistry, and semiconductor devices.

Publications per year

2005–2005

Publications

Explosion properties of highly concentrated ozone gas

Kunihiko Koike, M. Nifuku, Koichi Izumi et al. · Journal of Loss Prevention in the Process Industries · 2005 · 28 citations

Engineering, Chemical Engineering, Physics +8

Synthesis of silicon dioxide film using high-concentration ozone and evaluation of the film quality

Kunihiko Koike, Koichi Izumi, Sadaki Nakamura et al. · Journal of Electronic Materials · 2005 · 20 citations

Natural Sciences, Materials Engineering, Materials Science +13

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