Weinan Ye

Translational displacement computational algorithm of the grating interferometer without geometric error for the wafer stage in a photolithography scanner

Weinan Ye, Ming Zhang, Yu Zhu et al. · Optics Express · 2018 · 35 citations · Full text

Engineering, Mechanical Engineering, Mechatronics Engineering +14

Real-time displacement calculation and offline geometric calibration of the grating interferometer system for ultra-precision wafer stage measurement

Weinan Ye, Ming Zhang, Yu Zhu et al. · Precision Engineering · 2019 · 31 citations

Engineering, Manufacturing Engineering, Geometric Modeling +16

Ultraprecision Real-Time Displacements Calculation Algorithm for the Grating Interferometer System

Weinan Ye, Ming Zhang, Yu Zhu et al. · Sensors · 2019 · 25 citations · Full text

Natural Sciences, Physics, Optics +14

Two Degree-of-Freedom Fiber-Coupled Heterodyne Grating Interferometer with Milli-Radian Operating Range of Rotation

Fuzhong Yang, Ming Zhang, Yu Zhu et al. · Sensors · 2019 · 23 citations · Full text

Engineering, Electrical Engineering, Optics +16

Grating Interferometer with Redundant Design for Performing Wide-Range Displacement Measurements

Weinan Ye, Rong Cheng, Ming Zhang et al. · Sensors · 2022 · 18 citations · Full text

Engineering, Electrical Engineering, Manufacturing Engineering +17