Statistics
Publications
1
Citations
13
H-Index
1
Active since
2003
Affiliations
Applied Materials (United States)(Current)
B. Patada is an author at Applied Materials (United States) specializing in etch-induced defects, cathode processes, and semiconductor devices.
Publications per year
2003–2003
1
1
Backend dielectric etch induced wafer arcing mechanism and solution
Shawming Ma, N. Hanabusa, Brad Mays et al. · 2003 · 13 citations
Engineering, Electrical Engineering, Materials Engineering +15
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