Concepedia

Yiping Song

YS

Statistics

Publications

1

Citations

20

H-Index

1

Active since

2010

Affiliations

SPTS Technologies (United Kingdom)(Current)

Yiping Song is an author at SPTS Technologies (United Kingdom) specializing in computer engineering, applied physics, and calibration.

Top concepts

Publications per year

2010–2010

1

Publications

1

A new plasma source for next generation MEMS deep Si etching: Minimal tilt, improved profile uniformity and higher etch rates

Richard Barnett, Dave Thomas, Yiping Song et al. · 2010 · 20 citations

, , +21

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