Concepedia
Statistics
Publications
8
Citations
396
H-Index
Active since
2017
Affiliations
Harbin Institute of Technology(Current)
National University of Singapore
Shanghai Fudan Microelectronics (China)
Fudan University
Ministry of Industry and Information Technology
Fazhi Song is an author at Harbin Institute of Technology specializing in engineering, process control, and mechatronics engineering.
Publications per year
2017–2025
Learning Control for Motion Coordination in Wafer Scanners: Toward Gain Adaptation
Fazhi Song, Yang Liu, Dong Shen et al. · IEEE Transactions on Industrial Electronics · 2022 · 95 citations
Engineering, Mechatronics Engineering, Microelectromechanical Systems +15
Iterative Learning Identification and Compensation of Space-Periodic Disturbance in PMLSM Systems With Time Delay
Fazhi Song, Yang Liu, Jian‐Xin Xu et al. · IEEE Transactions on Industrial Electronics · 2017 · 81 citations
Engineering, Mechanical Engineering, Mechatronics Engineering +17
Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables
Fazhi Song, Yang Liu, Jian‐Xin Xu et al. · IEEE Transactions on Industrial Electronics · 2018 · 51 citations
Engineering, Industrial Engineering, Manufacturing Engineering +14
Data-Driven Feedforward Learning With Force Ripple Compensation for Wafer Stages: A Variable-Gain Robust Approach
Fazhi Song, Yang Liu, Wen Jin et al. · IEEE Transactions on Neural Networks and Learning Systems · 2020 · 49 citations
Engineering, Mechatronics Engineering, Machine Learning +16
Motion Control of Wafer Scanners in Lithography Systems: From Setpoint Generation to Multistage Coordination
Fazhi Song, Yang Liu, Dong Yue et al. · IEEE Transactions on Instrumentation and Measurement · 2024 · 40 citations
Engineering, Manufacturing Engineering, Mechatronics Engineering +17
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