Concepedia

Yue Jia Zhang

YJ

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Publications

1

Citations

28

H-Index

1

Active since

2015

Affiliations

Institute of Microelectronics(Current)

Yue Jia Zhang is an author at Institute of Microelectronics specializing in applied physics, microfabrication, and materials characterization.

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Publications per year

2015–2015

1

Publications

1

Deep SiO<sub>2</sub>etching with Al and AlN masks for MEMS devices

Vladimir Bliznetsov, Huamao Lin, Yue Jia Zhang et al. · Journal of Micromechanics and Microengineering · 2015 · 28 citations

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