M. Elliq

Pulsed laser crystallization and doping for the fabrication of high-quality poly-Si TFTs

É. Fogarassy, H. Pattyn, M. Elliq et al. · Applied Surface Science · 1993 · 41 citations

Materials Science, Laser Crystallization, Engineering +5

Influence of hydrogen on the structure and surface morphology of pulsed ArF excimer laser crystallized amorphous silicon thin films

E.L. Mathé, A. Naudon, M. Elliq et al. · Applied Surface Science · 1992 · 19 citations

Materials Science, Engineering, Optical Properties +8

Excimer laser recrystallization of amorphous Si films characterized by grazing X-ray diffraction and optical reflectivity

E.L. Mathé, J.G. Maillou, A. Naudon et al. · Applied Surface Science · 1989 · 14 citations

Materials Science, Optical Materials, Engineering +10

Pulsed excimer and Nd:YAG laser crystallization of a-Si:H

M. Elliq, É. Fogarassy, J.P. Stoquert et al. · Applied Surface Science · 1990 · 13 citations

Physics, Crystal Growth Technology, Applied Physics +3

Pulsed laser crystallization of hydrogen-free a-Si thin films for high-mobility poly-Si TFT fabrication

É. Fogarassy, B. Prévot, S. de Unamuno et al. · Applied Physics A · 1993 · 13 citations

Materials Science, Laser Crystallization, Engineering +8