Concepedia

Degang Cheng

DC

1

Publications

16

Citations

1

H-Index

1999

Active since

Affiliations

Semiconductor Energy Laboratory (Japan)(Current)

Degang Cheng is an author at Semiconductor Energy Laboratory (Japan) specializing in materials engineering, engineering, and chemical engineering.

Top concepts

ChemistryThin FilmsEngineeringApplied PhysicsSurface ScienceMaterial ScienceChemical KineticsSurface ChemistryChemical EngineeringMaterials Engineering

Publications per year

1999–1999

1

Publications

1

Thermal desorption spectra of SiO2 films deposited on Si and on thermal SiO2 by tetraethylorthosilicate/O3 atmospheric-pressure chemical vapor deposition

Degang Cheng, Koji Tsukamoto, Hiroshi Komiyama et al. · Journal of Applied Physics · 1999 · 16 citations

Engineering, Chemistry, Chemical Deposition +19

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