A. V. Sankaran

Statistics

Publications

Citations

245

H-Index

Active since

1963

Affiliations

University of Illinois Urbana-Champaign(Current)

A. V. Sankaran is an author at University of Illinois Urbana-Champaign specializing in natural sciences, materials science, and materials engineering.

ORCID

Publications per year

1963–2004

Publications

Integrated feature scale modeling of plasma processing of porous and solid SiO2. I. Fluorocarbon etching

A. V. Sankaran, Mark J. Kushner · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 57 citations

Engineering, Materials Engineering, Materials Science +17

Fluorocarbon plasma etching and profile evolution of porous low-dielectric-constant silica

A. V. Sankaran, Mark J. Kushner · Applied Physics Letters · 2003 · 51 citations

Natural Sciences, Materials Engineering, Materials Science +15

Etching of porous and solid SiO2 in Ar∕c-C4F8, O2∕c-C4F8 and Ar∕O2∕c-C4F8 plasmas

A. V. Sankaran, Mark J. Kushner · Journal of Applied Physics · 2004 · 35 citations

Natural Sciences, Materials Engineering, Materials Science +17

Indian Continental Lithosphere: Emerging Research Trends

A. V. Sankaran · Gondwana Research · 2004 · 23 citations

Natural Sciences, Earth Sciences, Geology +14

Integrated feature scale modeling of plasma processing of porous and solid SiO2. II. Residual fluorocarbon polymer stripping and barrier layer deposition

A. V. Sankaran, Mark J. Kushner · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 21 citations

Natural Sciences, Materials Engineering, Materials Science +17

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