3
Publications
68
Citations
3
H-Index
2020
Active since
Affiliations
Helsinki Institute of Physics(Current)
Enni Hartikainen is an author at Helsinki Institute of Physics specializing in engineering, materials science, and mechanical engineering.
Top concepts
EngineeringMaterial ScienceSurface ScienceMechanical EngineeringCoatingsHydrogenThin FilmsHeat TransferPlasma PhysicsApplied Physics
Publications per year
2020–2022
3
3
High-fidelity patterning of AlN and ScAlN thin films with wet chemical etching
Konsta Airola, Stefan Mertin, J. Likonen et al. · Materialia · 2022 · 23 citations · Full text
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