Concepedia

R. T. Fulks

RT

Statistics

Publications

17

Citations

516

H-Index

12

Active since

1981

Affiliations

Palo Alto Research Center(Current)

Varian Medical Systems (United States)

Whale Center of New England

Hewlett-Packard (United States)

R. T. Fulks is an author at Palo Alto Research Center specializing in materials science, materials engineering, and silicon materials.

Publications per year

1981–2001

17

Publications

17

Rapid isothermal annealing of ion implantation damage using a thermal radiation source

R. T. Fulks, C. J. Russo, P. R. Hanley et al. · Applied Physics Letters · 1981 · 73 citations

, , +17

Activation of arsenic-implanted silicon using an incoherent light source

R. A. Powell, T. O. Yep, R. T. Fulks · Applied Physics Letters · 1981 · 64 citations

, , +15

Initial reactions and silicide formation of titanium on silicon studied by Raman spectroscopy

R. J. Nemanich, R. T. Fulks, B. Stafford et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1985 · 62 citations

, , +17

Optimization of BF2+ implanted and rapidly annealed junctions in silicon

I‐Wen Wu, R. T. Fulks, J. C. Mikkelsen · Journal of Applied Physics · 1986 · 56 citations

, , +17

Laser Processing of Polysilicon Thin-Film Transistors: Grain Growth and Device Fabrication

J. B. Boyce, P. Mei, R. T. Fulks et al. · physica status solidi (a) · 1998 · 42 citations

, , +17

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