Concepedia

A. Ils

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Publications

1

Citations

26

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1

Active since

2000

Affiliations

École Polytechnique Fédérale de Lausanne(Current)

A. Ils is an author at École Polytechnique Fédérale de Lausanne specializing in applied physics, microelectronics, and surface science.

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Publications per year

2000–2000

1

Publications

1

Modeling of the depletion of the amorphous-silicon surface during hemispherical grained silicon formation

J.-M. Sallese, A. Ils, D. Bouvet et al. · Journal of Applied Physics · 2000 · 26 citations

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