Concepedia

Keita Kitade

KK

Statistics

Publications

3

Citations

33

H-Index

3

Active since

2011

Affiliations

Accretech (Japan)(Current)

Keita Kitade is an author at Accretech (Japan) specializing in materials science, magnetic flux distribution, and eddy current sensing.

Publications per year

2011–2019

3

Publications

3

Development of Original End Point Detection System Utilizing Eddy Current Variation Due to Skin Effect in Chemical Mechanical Polishing

Takashi Fujita, Keita Kitade, Toshiyuki Yokoyama · Japanese Journal of Applied Physics · 2011 · 12 citations

Engineering, Electrical Engineering, Materials Science +13

Development of endpoint detection using optical transmittance and magnetic permeability based on skin effect in chemical mechanical planarization

Takashi Fujita, Keita Kitade · Precision Engineering · 2019 · 11 citations

Engineering, Materials Engineering, Materials Science +17

Verification of Operation Principle on End Point Detection by Skin Effect in Chemical Mechanical Planarization

Takashi Fujita, Keita Kitade · ECS Journal of Solid State Science and Technology · 2017 · 10 citations

Engineering, Electrical Engineering, Materials Science +17

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