Concepedia

Author

Jeffrey J. Farber

Lam Research (United States)

Also Known As

J. J. Farber, Jeffrey Farber, Jeffrey J. Farber

3

Publications

22

Citations

2

H-Index

13

Concepts

All Affiliations

Lam Research (United States)
JJ

About

Jeffrey J. Farber is an author at Lam Research (United States) specializing in microelectronics, surface science, and surface engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

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Engineering

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Applied Physics

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Materials Engineering

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Materials Science

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Mechanical Engineering

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Jeffrey J. Farber

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1

Publications

13

Citations

1

H-Index

YearCitations

The Effects of Post Chemical Mechanical Planaization Buffing on Defect Density of Tungsten and Oxide Wafers

James Shen, Wesley D. Costas, Lee M. Cook,

Journal of The Electrochemical Society

1998

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