Concepedia

Y. J. Chen

YJ

1

Publications

14

Citations

1

H-Index

1997

Active since

Affiliations

University of Maryland, Baltimore County(Current)

Y. J. Chen is an author at University of Maryland, Baltimore County specializing in optoelectronics, applied physics, and electrical engineering.

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Publications per year

1997–1997

1

Publications

1

Ultrahigh vacuum chemically assisted ion beam etching system with a three grid ion source

J.V. Hryniewicz, Y. J. Chen, Shih Hsu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 14 citations

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