Concepedia

Author

Y. J. Chen

University of Maryland, Baltimore County

Also Known As

Y. J. Chen

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Publications

14

Citations

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H-Index

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Concepts

All Affiliations

University of Maryland, Baltimore County
YJ

About

Y. J. Chen is an author at University of Maryland, Baltimore County specializing in optoelectronics, applied physics, and electrical engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

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Engineering

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Applied Physics

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Electrical Engineering

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Microelectronics

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Optoelectronics

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Y. J. Chen

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1

Publications

14

Citations

1

H-Index

YearCitations

Ultrahigh vacuum chemically assisted ion beam etching system with a three grid ion source

J.V. Hryniewicz, Y. J. Chen, Shih Hsu,

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

1997

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