Statistics
Publications
1
Citations
34
H-Index
1
Active since
2002
Affiliations
The University of Tokyo(Current)
Hirokazu Kubo is an author at The University of Tokyo.
Publications per year
2002–2002
1
1
157-nm coherent light source as an inspection tool for F_2 laser lithography
Takashi Suganuma, Hirokazu Kubo, Osamu Wakabayashi et al. · Optics Letters · 2002 · 34 citations
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