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Publications
2
Citations
52
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Active since
2003
Henry Birner is an author specializing in extreme ultraviolet lithography, high-temperature plasmas, and photonics.
Publications per year
2003–2004
High-power EUV lithography sources based on gas discharges and laser-produced plasmas
Uwe Stamm, Imtiaz Ahmad, István Balogh et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 37 citations
Natural Sciences, Materials Science, Physics +14
EUV source power and lifetime: the most critical issues for EUV lithography
Uwe Stamm, J. Kleinschmidt, Kai Gaebel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 15 citations
Engineering, Manufacturing Engineering, Physics +14
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