Concepedia

Shimpei Mutoh

SM

1

Publications

10

Citations

1

H-Index

1977

Active since

Affiliations

Hitachi (Japan)(Current)

Shimpei Mutoh is an author at Hitachi (Japan) specializing in applied physics, microfabrication, and chemical engineering.

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Publications per year

1977–1977

1

Publications

1

Glass Flow Mechanism of Phosphosilicate Glass and Its Application in MOS Devices

Norikazu Hashimoto, Yuji Yatsuda, Shimpei Mutoh · Japanese Journal of Applied Physics · 1977 · 10 citations · Full text

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