Concepedia
Statistics
Publications
4
Citations
72
H-Index
Active since
2008
Affiliations
Sungkyunkwan University(Current)
Samsung (South Korea)
Sanghyun Kang is an author at Sungkyunkwan University specializing in applied physics, engineering, and materials science.
Top concepts
EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsElectrical EngineeringMicrofabricationPhysicsCorrosionNanotechnology
Publications per year
2008–2013
Low angle forward reflected neutral beam source and its applications
B J Park, Seungwoo Kim, Sanghyun Kang et al. · Journal of Physics D Applied Physics · 2008 · 23 citations
Engineering, Electron-beam Lithography, Beam Optic +17
X-ray photoelectron spectroscopic study of Ge2Sb2Te5 etched by fluorocarbon inductively coupled plasmas
Sanghyun Kang, Jong Sik Oh, B. J. Park et al. · Applied Physics Letters · 2008 · 19 citations
Materials Science, Ii-vi Semiconductor, Surface Characterization +11
Characteristics of SiO2 etching by using pulse-time modulation in 60 MHz/2 MHz dual-frequency capacitive coupled plasma
Minjeong Jeon, AC Mishra, Sanghyun Kang et al. · Current Applied Physics · 2013 · 18 citations
Electrical Engineering, Engineering, Microfabrication +8
Effect of Halogen-Based Neutral Beam on the Etching of Ge2Sb2Te5
Sanghyun Kang, M. H. Jeon, J. Y. Park et al. · Journal of The Electrochemical Society · 2011 · 12 citations
Engineering, Electron-beam Lithography, Vacuum Device +17
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