Statistics
Publications
1
Citations
12
H-Index
1
Active since
2001
Affiliations
M. Begemann is an author at Fraunhofer Institute for Microengineering and Microsystems specializing in bulk micromachining, mems fabrication, and engineering.
Publications per year
2001–2001
1
1
Highly parallel mass fabrication and assembly of microdevices
M. Begemann, A. Lohf, Matthias Nienhaus et al. · Microsystem Technologies · 2001 · 12 citations
Engineering, Manufacturing Engineering, Materials Science +12
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