Concepedia

Siwen Lu

SL

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Publications

2

Citations

29

H-Index

2

Active since

2022

Affiliations

Tongji University(Current)

Siwen Lu is an author at Tongji University specializing in materials engineering, material processing, and chemical engineering.

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Publications per year

2022–2024

2

Publications

2

Surface Morphology Evolution during Chemical Mechanical Polishing Based on Microscale Material Removal Modeling for Monocrystalline Silicon

Jingjing Xia, Jun Yu, Siwen Lu et al. · Materials · 2022 · 18 citations · Full text

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Investigating the partial plastic formation mechanism of typical scratches on silicon wafers induced by rogue particles during chemical mechanical polishing

Siwen Lu, Jingjing Xia, Jun Yu et al. · Materials Science in Semiconductor Processing · 2024 · 11 citations

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