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Publications
1
Citations
10
H-Index
Active since
2007
K C Chen is an author specializing in etch chemistry, surface engineering, and electronic materials.
Publications per year
2007–2007
Effects of BCl<sub>3</sub>gas on physical damage and Al residues in oxide hard-mask-based Al etching
H J Lee, C H Lee, Nan-Tzu Lian et al. · Semiconductor Science and Technology · 2007 · 10 citations
Natural Sciences, Materials Engineering, Materials Science +14
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