Statistics
Publications
1
Citations
25
H-Index
1
Active since
1992
Affiliations
M. Eckberg is an author at Max Planck Institute for Solid State Research specializing in focused ion beam patterning, electronic materials, and ion implantation.
Publications per year
1992–1992
1
1
Lateral spreading of focused ion-beam-induced damage
T. Bever, G. Jäger-Waldau, M. Eckberg et al. · Journal of Applied Physics · 1992 · 25 citations
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