F. Fukumaru

The LEKKO VIII CO<inf>2</inf>gas laser system

Chiyoe Yamanaka, S. Nakai, M. Matoba et al. · IEEE Journal of Quantum Electronics · 1981 · 32 citations

Engineering, Laser Science, Lekko Ii 1 +15

Modification of solid surface by intense pulsed light-ion and metal-ion beams

Y. Nakagawa, Takeshi Ariyoshi, Hideshi Hanjo et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1989 · 25 citations

Materials Science, Ion Implantation, Engineering +6

Development of high current metal ion beam source

H. Inami, F. Fukumaru, Yutaka Inouchi et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1989 · 10 citations

Ion Implantation, Electrical Engineering, Engineering +2

High-current metal ion beam extraction from a multicusp ion source

Yutaka Inouchi, Hideki Tanaka, H. Inami et al. · Review of Scientific Instruments · 1990 · 10 citations

Electrical Engineering, Ion Implantation, Engineering +11