Concepedia

Chaira Cavallari

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1

Publications

15

Citations

1

H-Index

1987

Active since

Affiliations

Institute for Microelectronics and Microsystems(Current)

Chaira Cavallari is an author at Institute for Microelectronics and Microsystems specializing in applied physics, thin films, and surface science.

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Publications per year

1987–1987

1

Publications

1

Plasma Processing for Silicon Oxynitride Films

Chaira Cavallari, F. Gualandris · Journal of The Electrochemical Society · 1987 · 15 citations

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