Concepedia

Author

Takaharu Hiruma

Chiba University

Also Known As

Takaharu Hiruma

1

Publications

19

Citations

1

H-Index

7

Concepts

All Affiliations

Chiba University
TH

About

Takaharu Hiruma is an author at Chiba University specializing in engineering, biomedical engineering, and microfabrication.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

1

1

19

2

Applied Physics

1

1

19

3

Biomedical Engineering

1

1

19

4

Materials Science

1

1

19

5

Nanomaterials

1

1

19

Takaharu Hiruma

×

1

Publications

19

Citations

1

H-Index

YearCitations

Low-pressure plasma-etching of bulk polymer materials using gas mixture of CF4 and O2

Hirofumi NABESAWA, Takaharu Hiruma, Takeshi Hitobo,

AIP Advances

2013

19

Page 1