Concepedia

Päivi Sievilä

PS

6

Publications

175

Citations

6

H-Index

2007

Active since

Affiliations

Aalto University(Current)

Päivi Sievilä is an author at Aalto University specializing in microfabrication, engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicrofabricationMicroelectronicsInstrumentationNanoelectronicsSurface ScienceSensor TechnologyMaterials Engineering

Publications per year

2007–2014

6

Publications

6

The fabrication of silicon nanostructures by focused-ion-beam implantation and TMAH wet etching

Päivi Sievilä, Nikolai Chekurov, Ilkka Tittonen · Nanotechnology · 2010 · 61 citations

Engineering, Electron-beam Lithography, Silicon On Insulator +17

Fabrication and characterization of an ultrasensitive acousto-optical cantilever

Päivi Sievilä, V-P Rytkönen, O. Hahtela et al. · Journal of Micromechanics and Microengineering · 2007 · 33 citations

Engineering, Mechanical Engineering, Cantilever-type Silicon Device +18

Focused ion beam lithography for fabrication of suspended nanostructures on highly corrugated surfaces

Mikhail Erdmanis, Päivi Sievilä, Ali Shah et al. · Nanotechnology · 2014 · 29 citations

Sensitivity-improved silicon cantilever microphone for acousto-optical detection

Päivi Sievilä, Nikolai Chekurov, Jussi Raittila et al. · Sensors and Actuators A Physical · 2012 · 21 citations

Acousto-optical Detection, Optical Sensor, Instrumentation +2

Atomic layer deposited alumina (Al<sub>2</sub>O<sub>3</sub>) thin films on a high-<i>Q</i>mechanical silicon oscillator

O. Hahtela, Päivi Sievilä, Nikolai Chekurov et al. · Journal of Micromechanics and Microengineering · 2007 · 19 citations

Engineering, Mechanical Engineering, Thin Film Process Technology +17

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