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Ryo Sano

RS

1

Publications

39

Citations

1

H-Index

2015

Active since

Affiliations

University of Hyogo(Current)

Ryo Sano is an author at University of Hyogo specializing in microfabrication, thin-film technology, and mechanical engineering.

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Publications per year

2015–2015

1

Publications

1

Fabrication of multilayer Pb(Zr,Ti)O<sub>3</sub>thin film by sputtering deposition for MEMS actuator applications

Ryo Sano, Jun‐ichi Inoue, Kensuke Kanda et al. · Japanese Journal of Applied Physics · 2015 · 39 citations

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