Statistics
Publications
1
Citations
11
H-Index
1
Active since
2013
Affiliations
IMEC(Current)
Adam Beacham is an author at IMEC specializing in etching processes, fabrication-oriented design rules, and semiconductor devices.
Publications per year
2013–2013
1
1
Avoiding wafer-print artifacts in spacer is dielectric (SID) patterning
Gerard Luk-Pat, Ben Painter, Alex Miloslavsky et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 11 citations
Natural Sciences, Electrical Engineering, Materials Science +11
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