Matthew Tom

Quantifying transport and electrocatalytic reaction processes in a gastight rotating cylinder electrode reactor via integration of Computational Fluid Dynamics modeling and experiments

Derek Richard, Matthew Tom, Joonbaek Jang et al. · Electrochimica Acta · 2022 · 21 citations · Full text

Electrocatalytic Reaction, Chemical Engineering, Electrohydrodynamics +11

Microscopic and data-driven modeling and operation of thermal atomic layer etching of aluminum oxide thin films

Sungil Yun, Matthew Tom, Junwei Luo et al. · Process Safety and Environmental Protection · 2021 · 20 citations · Full text

Materials Science, Data-driven Modeling, Engineering +10

Multiscale computational fluid dynamics modeling of thermal atomic layer etching: Application to chamber configuration design

Sungil Yun, Matthew Tom, Feiyang Ou et al. · Computers & Chemical Engineering · 2022 · 18 citations

Engineering, Microfabrication, Configuration Design +12

Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactor

Matthew Tom, Sungil Yun, Henrik Wang et al. · Computers & Chemical Engineering · 2022 · 17 citations

Engineering, Energy Efficiency, Process Control +4

Atomistic-mesoscopic modeling of area-selective thermal atomic layer deposition

Sungil Yun, Feiyang Ou, Henrik Wang et al. · Process Safety and Environmental Protection · 2022 · 15 citations

Materials Science, Engineering, Surface Science +5