S. Harvey is an author at University of South Florida specializing in applied physics, engineering, and materials engineering.
Top concepts
EngineeringApplied PhysicsMaterials EngineeringThin FilmsMicrostructureMaterial ScienceMicroelectronics
Publications per year
2006–2006
2
2
Development of a high-growth rate 3C-SiC on Si CVD process
M. Reyes, Y. Shishkin, S. Harvey et al. · MRS Proceedings · 2006 · 49 citations
Growth of 3C-SiC on Si Molds for MEMS Applications
M. Reyes, M. Waits, S. Harvey et al. · Materials science forum · 2006 · 13 citations
Materials Science, Materials Engineering, Epitaxial Growth +13
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