Concepedia

Eun-Jin Song

ES

2

Publications

22

Citations

2

H-Index

2018

Active since

Affiliations

Korea Institute of Materials Science(Current)

Eun-Jin Song is an author at Korea Institute of Materials Science specializing in microfabrication, chemical engineering, and materials engineering.

Top concepts

Thin FilmsEngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationChemical EngineeringMaterials Engineering

Publications per year

2018–2019

2

Publications

2

Silicon atomic layer etching by two-step plasma process consisting of oxidation and modification to form (NH<sub>4</sub>)<sub>2</sub>SiF<sub>6</sub>, and its sublimation

Eun-Jin Song, Jihye Kim, Jung‐Dae Kwon et al. · Japanese Journal of Applied Physics · 2018 · 11 citations

Engineering, Silicon On Insulator, Plasma Processing +16

Facile Interfacial Engineering of Mesoporous TiO2 for Low-Temperature Processed Perovskite Solar Cells

Jiyoon Nam, Inje Nam, Eun-Jin Song et al. · Nanomaterials · 2019 · 11 citations · Full text

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